Brooks VCE6 Cassette Elevator
Vacuum Components
Brooks VCE6 Cassette Elevator
Brooks cassette elevator for 100mm, 125mm, 150mm and 200mm wafers. Laser wafer mapping and wafer slideout detection. Auto Load Door and ergonomic platform.
Brooks cassette elevator for 100mm, 125mm, 150mm and 200mm wafers. Laser wafer mapping and wafer slideout detection. Auto Load Door and ergonomic platform.
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