Welcome to Deposition Technology
Advanced PVD and CVD Technology
The EVOS PVD system utilises the latest technology to deliver the best performance, robust reliability and lowest cost of ownership in its class, all packaged into a very small footprint. The EVOS is easily configurable and changeable between 100mm, 125mm,150mm and 200mm wafer sizes.
The Deptec Spectroptix® is a Remote Plasma Spectrometer (RPS) that works on the principle of creating an independent background plasma inside a vacuum chamber, then determines the species of the gas from analyzing the light spectrum omitted from the plasma. This allows the user to determine what materials are present in their vacuum chamber.