Q II Source

Deptecs Q II PVD Source is a replacement for the Varian Quantum PVD Source.
The Q II is machined from stronger material and is less susceptible to deformation due to mechanical and thermal stresses

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Replacement PVD Source

There are many Varian 3290 Sputtering systems in the field estimated 500, playing a key part in metallization processes in many Semiconductor FABs and Laboratories around the world. Many of the Magnetron Sources are now nearing EOL and the Deptec Q II is a perfect upgrade/replacement for them.

Original Quantum PVD Source

  • The Varian Quantum PVD source has been in use for over 20 years on the Varian 3290 Sputter system. 
  • The Quantum source is manufactured from thermoset plastic which has a tendency to deform over time due to temperature and pressure effects
  • Electrical components, High Voltage and Ground contacts, are set into the plastic during molding and not replaceable.
  • Water fittings are screwed into plastic threads in the housing and are easily damaged. 
  • Water lines are grounded to the inset ground plane which is subject to galvanic corrosion

Deptec Q II PVD Source

  • The Deptec replacement source, the Q II is machined from stronger material and is less susceptible to deformation due to mechanical and thermal stresses.
  • Combination water and ground inserts are manufactured from stainless steel and mechanically more reliable, resistant to corrosion and fully replaceable in the field.
  • High Voltage contact ring is removable and replaceable in the field.
  • The Deptec replacement source, the Q II is designed to conform to the original Varian dimensional specifications allowing the use of the original target design for seamless integration.
  • Optional upgrades to screw clamp targets for better electrical contact and improved water sealing.
  • All other original source components, bearing seal assembly, rotation sensor, rotation motor and manipulator directly mount to the new source for easy parts support.

Replacement Parts

Deptec offers OEM or OEM Quality replacements for all parts associated with the Quantum Sources:

  • Bearing Seal Assemblies
  • Magnet Extension Shafts
  • Magnet Shims
  • Rotation Sensors
  • Motors and Mounts
  • Water Fittings/Adapters
  • U and S Type Magnets
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